| 摘要 |
The polishing apparatus (10) is capable of transferring a work piece (W) to a top ring (16) without moving the work piece (W) from the center. The polishing apparatus (10) has a transfer unit (18) for transferring the work piece (W) to the top ring (16). The transfer unit (18) comprises: a guide member (45) having a receiving section, which centers the work piece (W); a mounting table (53) vertically moving with respect to the guide member (45), the mounting table (53) having a mounting section (54), which receives the centered work piece (W); and a supporting mechanism (56, 64) supporting the mounting table (53) and allowing the mounting table (53) to move downward. The mounting table (53) is relatively moved close to the top ring (16) and presses the work piece (W) onto the top ring (16) so as to transfer the work piece (W) to the top ring (16).
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