摘要 |
<p>A liquid detecting device (1200) including: a unit base (1210), provided with a recessed portion (1211) on an upper face thereof and containing a first material; a sensor base (1220), accommodated in the recessed portion and containing a second material different from the first material; a sensor chip (1230), mounted on an upper face of the sensor base (1220) and having a sensor cavity (1232) for receiving a liquid as a detection target, in which a lower face of the sensor cavity (1232) is formed to be opened for allowing the liquid to flow therein and an upper face thereof is closed by a vibration plate (1233) and provided with a piezoelectric element (1234) mounted on an upper face of the vibration plate (1233); an adhesive layer (1242), formed on the upper face of the sensor base and fixing and sealing the sensor chip (1230) and the sensor base (1220) to each other; and an adhesive film (1240), which fixes and seals the sensor base (1220) and the unit base (1210) to each other and of which an inner peripheral portion is adhered to the upper face of the sensor base (1220) and an outer peripheral portion is adhered to the upper face of the unit base (1210).</p> |