发明名称 Non-volatile memory cell and method of forming the same
摘要 A non-volatile memory cell comprising a transistor and two plane capacitors. In the memory cell, a switching device is disposed on a substrate, a first plane capacitor having a first doped region and a second plane capacitor having a second doped region. The switching device and the first and second plane capacitors share a common ploysilicon floating gate configured to retain charge as a result of programming the memory cell. The memory cell is configured to be erased by tunneling between the first doped region and the common ploysilicon floating gate without causing junction breakdown within the memory cell. The first and second doped regions are formed in the substrate before forming the common ploysilicon floating gate such that the capacitance of the first and second plane capacitors are constant when the memory cell operates within an operating voltage range.
申请公布号 US7115938(B2) 申请公布日期 2006.10.03
申请号 US20040828231 申请日期 2004.04.21
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分类号 H01L27/108;H01L21/28;H01L21/8247;H01L27/115;H01L29/423;H01L29/76;H01L29/788 主分类号 H01L27/108
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