发明名称 CONTACT HOLE FORMING DEVICE
摘要 A method for forming a contact hole, a method for manufacturing a circuit board and a method for manufacturing an electro-optical device that increase the reliability of electrical coupling via a conductive part and prevent wire-breaking due to projections when forming a contact hole in an interlayer film by using a needle, and burying a conductive material in the contact hole is provided.
申请公布号 KR20060103484(A) 申请公布日期 2006.10.02
申请号 KR20060087236 申请日期 2006.09.11
申请人 SEIKO EPSON CORPORATION 发明人 HARADA MITSUAKI;MORIYA SOICHI
分类号 H01L21/28;H01L21/3205 主分类号 H01L21/28
代理机构 代理人
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