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发明名称
Precursor canister with diffuser
摘要
申请公布号
KR200427901(Y1)
申请公布日期
2006.10.02
申请号
KR20060019171U
申请日期
2006.07.14
申请人
发明人
分类号
H01L21/02;H01L21/00;H01L21/205
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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