FABRICATION OF LONG-RANGE PERIODIC NANOSTRUCTURES IN GLASS
摘要
<p>To make high quality long-range periodic nanostructures in a transparent or semi- transparent substrate, the transparent or semi-transparent substrate is scanned with a linearly polarized laser beam generated by a femtosecond laser and exceeding a predetermined energy/pulse threshold along a scanning path. Sub-diffraction limit structures are formed as periodic planes of modified material in the transparent or semi- transparent substrate extending along the scanning path. The modified materi al can then be chemically etched to form cavities.</p>
申请公布号
CA2503309(A1)
申请公布日期
2006.09.30
申请号
CA20052503309
申请日期
2005.03.30
申请人
NATIONAL RESEARCH COUNCIL OF CANADA
发明人
HNATOVSKY, CYRIL;CORKUM, PAUL;RAYNER, DAVID;SIMOVA, ELI;BHARDWAJ, RAVI;TAYLOR, ROD