| 摘要 |
THE PRESENT INVENTION PROVIDES A METHOD AND APPARATUS TO PURIFY VARIOUS GASES UTILIZING THE SUPERIOR PERFORMANCE A HEATED GETTER PROCESS IN A SMALLER PACKAGE THAN PREVIOUS MULTIPLE STAGE, HEATED GETTER PROCESSES. THE SMALLER PACKAGE (200) INCLUDES INNER AND OUTER ENCLOSURES (202) , AND AN INTEGRAL, REGENERATIVE HEAT EXCHANGER TO SIMULTANEOUSLY INCREASE HEATER EFFICIENCY AND COOL THE PURIFIED GAS. THE INVENTION ALSO INCLUDES A PARTICLE FILTER (244) TO REMOVE PARTICLES FROM THE GAS FLOW. THE INVENTION FURTHER PROVIDES AN INTERFACE (216) TO VARIOUS MODULAR GAS STICK SUBSTRATE DESIGNS WITH AN INLET (214) AND AN OUTLET (212) IN ONE END OF THE INTEGRATED HEATED GETTER PURIFIER SYSTEM (200). THE INLET GAS IS PREHEATED (304) BY THE INTEGRAL HEAT EXCHANGER AND THEN HEATED TO OPERATING TEMPERATURE OF 200-400°C (306). THE HEATED GETTER (245) REMOVES VARIOUS IMPURITIES FROM THE GAS (308). THE HEATED GAS IS THEN COOLED (310) IN THE INTEGRAL HEAT EXCHANGER. THE COOLED GAS IS EXPOSED (312) TO A SECOND QUANTITY OF COOLER GETTER (246) TO REMOVE RESIDUAL IMPURITIES. THE GAS IS THEN, PREFERABLY, FILTERED (314) TO REMOVE PARTICLES BEFORE RELEASING TO BE UTILIZED IN SEMICONDUCTOR PROCESSING AND INTEGRATED CIRCUIT DEVICE MANUFACTURING AND OTHER INDUSTRIES.FIGURE 6
|
