| 摘要 |
An object of the present invention is to provide a flat substrate holding apparatus, capable of efficiently holding a flat substrate, such as a glass substrate, when producing a flat panel display, such as a liquid crystal display, a Plasma Display Panel, or an organic light emitting display, in addition to firmly holding the flat substrate even when the flat substrate is transported from a processing stage to another processing stage. The apparatus holds a flat substrate placed on an upper surface of a base which moves vertically, and includes a plurality of magnetic plates, a holding plate, and a separation plate. The magnetic plates are uniformly provided on an upper surface of the flat substrate. The holding plate is movably provided above the magnetic plates, and includes a plurality of permanent magnets provided on a lower surface of the holding plate to correspond to the magnetic plates, and a plurality of through holes provided throughout the holding plate. The separation plate is provided above the holding plate, with a plurality of actuating pins being provided on a lower surface of the separation plate to be inserted into the corresponding through holes, thus coming into contact with the upper surface of the flat substrate.
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