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发明名称
Valve device for use of semiconductor apparatus
摘要
申请公布号
KR100629387(B1)
申请公布日期
2006.09.29
申请号
KR20000069010
申请日期
2000.11.20
申请人
发明人
分类号
H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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