发明名称 APPARATUS FOR MEASURING ELECTRIC CHARGE
摘要 THE APPARATUS FOR MEASURING AN ELECTROSTATIC CHARGE INCLUDES A CONDUCTIVE PLATE (21) A VOLTAGE SOURCE (30) A FIRST SWITCH FOR CONNECTING THE CONDUCTIVE PLATE (21) TO THE VOLTAGE SOURCE (30) OR TO THE GROUND POTENTIAL; AN INSULATOR MEMBRANE (25) ARRANGED ON THE CONDUCTIVE PLATE (21) UPON A SAMPLE ELEMENT (28) IS TO BE PLACE. A CONDUCTIVE GROUNDED PLATE (23) IS ARRANGED PARALLEL TO THE CONDUCTIVE PLATE (21), AND A CONDUCTIVE PROBE (27) IS SECURED TO THE GROUNDED PLATE (23) THROUGH AN INSULATOR MATERIAL FOR PICKING UP THE ELECTROSTATIC CHARGE INDUCED IN THE SAMPLE ELEMENT (28) FROM THE SURFACE OF THE SAMPLE ELEMENT (28). A COULOMB METER (26) WITH FIRST ELECTRODE CONNECTED TO THE GROUNDED PLATE (23) FOR INDICATING THE QUANTITY OF THE ELECTROSTATIC CHARGE. COMPLETING THE APPARATUS IS A SECOND SWITCH FOR CONNECTING THE PROBE (27) TO THE SECOND ELECTRODE OF THE COULOMB METER (26) OR THE GROUNDED PLATE (23).
申请公布号 MY126057(A) 申请公布日期 2006.09.29
申请号 MYPI20004907 申请日期 2000.10.18
申请人 HARADA CORPORATION 发明人 KOUICHI SUZUKI
分类号 G01R29/12;G01R31/26;G01R1/06;G01R29/24;H01L21/66 主分类号 G01R29/12
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