| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of highly accurate dimension measurement in the whole domain of a measuring object, even when performing distance measurement of the measuring object having camber such as a mounted printed board. SOLUTION: This device is equipped with an X-ray imaging means 104 of a flat light receiving plane for imaging a transmission X-ray of a measuring object by irradiating the measuring object 103 with the X-ray, a moving means 105 for moving the measuring object 103 in parallel with the X-ray imaging means 104 of the flat light receiving plane, a moving distance measuring means for measuring the moving distance by the moving means 105 and the moving distance of an imaging position in a reference domain on the measuring object 103 on the X-ray imaging means 104 of the light receiving plane, and a photographing magnification calculation means for calculating the imaging magnification of each unit pixel of a transmission image of the measuring object from the moving distance of the measuring object measured by the moving distance measuring means and the moving distance of the imaging position of the transmission image of the reference domain. Distance correction of the moving distance of the transmission image is performed by using the imaging magnification of each calculated unit pixel, and the distance on the measuring object is determined. COPYRIGHT: (C)2006,JPO&NCIPI
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