| 摘要 |
PROBLEM TO BE SOLVED: To highly densely wire a line for supplying a driving signal to each piezoelectric element, and also to improve reliability of joining. SOLUTION: In the liquid delivering head, a plurality of pressure chambers are arranged in a two-dimensional matrix. The pressure chamber communicates with a nozzle which delivers a liquid. One wall face of the pressure chamber is constructed by a diaphragm with the piezoelectric element formed on its upper face. In the liquid delivering head and its manufacturing method, a sealing member and a common liquid chamber are provided. The sealing member seals the piezoelectric element while a space is secured at the opposite side to the diaphragm of the piezoelectric element. The sealing member also seals an electric wiring line formed rising nearly perpendicularly to a plane where the piezoelectric element is arranged. The common liquid chamber is formed at the opposite side to the pressure chamber with respect to the sealing member, and supplies the liquid to the pressure chambers. COPYRIGHT: (C)2006,JPO&NCIPI
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