| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning apparatus capable of obtaining a flow of a washing liquid of a uniform flow rate over the width of a substrate. SOLUTION: The ultrasonic cleaning apparatus 1 is constituted by arranging an upper casing 10 with a built-in ultrasonic vibrator 3 so as to oppose to a lower casing 20 with a clearance 2 through which a glass substrate W can be passed. A side wall face on one side of each casing is installed with a washing liquid supply part 30, and a side wall face on the other side of the casing is installed with a washing liquid discharge part 40. These are arranged so as to pinch a packing 31 of a hydrophilic soft resin between the wall face on the casing side and a nozzle plate 32 of a hydrophilic hard resin. The nozzle plate 32 is formed with a recess, and a wall part on the side opposite to the clearance 2 of the recess is bored with a plurality of rectification holes. The washing liquid supplied from a washing liquid supply pipe 6 is reserved in a space formed with the recess and the packing 31, supplied to the clearance 2 through the rectification holes, and sucked and discharged from the washing liquid discharge part 40. COPYRIGHT: (C)2006,JPO&NCIPI
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