发明名称 Electron bombardment heating apparatus and temperature controlling apparatus and control method thereof
摘要 An electron bombardment heating apparatus, in which thermions emitted from filaments 9 are accelerated and impinged upon a heating plate 2 , so as to heat the heating plate 2 , wherein a periphery wall of a heated material supporting member 1 having a heating plate as a ceiling thereof is made up with multi-staged periphery wall portions 13 a and 13 b, being piled up vertically and different in the radius thereof, and those periphery wall portions 13 a and 13 b are connected with each other by means of a ring-like horizontal wall 5 . With this, thermal stress can be mitigated, which is caused due to the difference of temperature between the lower end portion of the heated material supporting member 1 and the heating plate 2 when heating up the heating plate 2 , thereby bringing about no breakage in the heated material supporting member if conducting heating and cooling upon the heating plate, repetitively.
申请公布号 US2006213876(A1) 申请公布日期 2006.09.28
申请号 US20060444727 申请日期 2006.06.01
申请人 SUKEGAWA ELECTRIC CO., LTD. 发明人 HAGA SHIGETAKA
分类号 B23K15/00;H01L21/00;H05B3/14;H05B3/74 主分类号 B23K15/00
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