METHOD FOR OPERATING A PULSED ARC EVAPORATION SOURCE AND VACUUM PROCESS SYSTEM COMPRISING SAID PULSED ARC EVAPORATION SOURCE

摘要

The invention relates to a vacuum process system for surface-treating work pieces (3) using an arc evaporation source (5). Said system comprises a first electrode (5') connected to a DC power source (13) and a second electrode (3, 18, 20), disposed separately from the arc evaporation source (5). The two electrodes (5', 3, 18, 20) are operated while being connected to a single pulsed power supply (16).