| 摘要 |
<p>A flow control device and a flow control method capable of controlling a flow at high rangeability while maintaining high controllability. The flow control device comprises fluid pipelines (1), (2), (4), and (5) and a flat plate-like valve support substrate (3) disposed midway in the fluid pipelines. A plurality of independently operable opening/closing valves (11) are installed in the valve support substrate (3). Thus, flow control at high rangeability can be performed by opening and closing the specific opening/closing valve properly selected from among the plurality of opening/closing valves (11).</p> |
