| 摘要 |
PROBLEM TO BE SOLVED: To compatibly materialize low temperature air tightness at an annular end surface of a second valve 7, a part between a molded rubber (in an embodiment, sealing rubber such as fluororubber) 9 having an inside thereof molded by rubber and a valve seat of a resin housing 5, and retention of non-adhesive nature of DIC coating 96. SOLUTION: A valve seat part 8 made of stainless steel is provided on the valve seat of the resin housing 5, and non-adhesive agent 47 is coated on a surface of the valve seat part 8. On the other hand, thin DLC coating 96 of Vickers hardness Hv 100-200 is formed on a surface of the molded rubber 9 of the second valve 7 which requires strict low temperature airtightness. Consequently, even if the molded rubber 9 is repeatedly seated on and separated from the valve seat part 8, wear resistance and low temperature airtightness between the molded rubber 9 of the second valve 7 and the valve seat of the resin housing 5 does not drop, and durability and reliability of the second valve 7 functioning as a pressure sensitive valve can be improved. COPYRIGHT: (C)2006,JPO&NCIPI |
