| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems in the conventional three-dimensional photonic crystal that the manufacturing method is difficult, the productivity is low and the manufacturing cost is high. SOLUTION: Instead of the conventional three-dimensional photonic crystal made by piling rods, the parts between rods are removed by using etching technology widely used in semiconductor industry, hollow regions are formed and, as the result, the structure made by piling the rods is realized. COPYRIGHT: (C)2006,JPO&NCIPI |
