METHOD OF FORMING FILM PATTERN, METHOD OF MANUFACTURING DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a film pattern which is capable of consistently forming a fine film pattern with high performance.

SOLUTION: The method of forming a film pattern by disposing a functional liquid on a substrate includes: a bank forming step S1 of forming banks corresponding to the film pattern on the substrate; an irregularity forming step S4 of forming irregularities on bottoms between the banks by using the banks as a mask; and a material disposing step S5 of disposing the functional liquid between the banks and on the bottoms formed with the irregularities.

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