| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus high in safety causing no defect or breakage of a gas inlet nozzle when coupling a gas supply tube with the gas inlet nozzle in the substrate processing apparatus. SOLUTION: The substrate processing apparatus includes a processing pipe 1 for storing a substrate, the gas inlet nozzle 11 for leading a required treatment gas into the processing pipe and having an external end 12 extending through the wall of the processing pipe out of the pipe, a gas supply pipe 13 for supplying the treatment gas to the gas inlet nozzle, and a coupling member 15 for coupling the external end with the gas supply pipe. Further, a spacer 68 is provided between the coupling member and an external surface of the processing pipe. COPYRIGHT: (C)2006,JPO&NCIPI
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