| 摘要 |
PROBLEM TO BE SOLVED: To stably form a wiring pattern, which is related to a manufacturing method of a head slider support. SOLUTION: The wiring pattern of a load beam 21 is formed by performing a pattern formation step 110. In the pattern formation step 110, a photosensitive polyimide is applied on a stainless steel board, and an insulating layer is formed with photolithography technology. A copper thin film is formed with plating etc. thereon, and the copper thin film is formed into, for example, a copper wiring pattern with photolithography technology. Furthermore, a photosensitive polyimide is applied again to form a protective film and an auxiliary film with photolithography technology. COPYRIGHT: (C)2006,JPO&NCIPI
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