| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy of positioning a master disk and a slave disk in a magnetic transferring device. SOLUTION: The magnetic transferring device is so configured as to measure the positional shift amount of the master disk 2 held by a 1st holding means 3 to correct the positional shift amount of the master disk 2 by moving a stage 5, and also as to move the 1st holding means 3 which releases holding of the master disk 2 in the state of being held by a 2nd holding means 9, to the original position where the 1st holding means 3 is made to hold the master disk 2 again to measure the position, and thereby highly accurate positioning becomes always possible at an optimum position in the center part without accumulating the shift and without deviation from a structural positional correction range. COPYRIGHT: (C)2006,JPO&NCIPI
|
