| 摘要 |
A processing apparatus includes: a mounting table on which a carriage container containing a plurality of substrates is placed; a process chamber in which predetermined processing is applied to the substrate; a temporary storage unit having a substrate loading part on which the plural processed substrates are loaded in multi-tiers; a transfer unit having a carrier arm carrying the substrate to/from the carriage container on the mounting table, the process chamber, and the temporary storage unit; a vibration sensor detecting vibration of the substrate loading part; and a control unit which compares a current detection value of the vibration sensor with a predetermined set value to judge whether or not the vibration is abnormal vibration and to stop the carrier arm when judging that the vibration is the abnormal vibration.
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