发明名称 Semiconductor device and method for manufacturing same
摘要 The present semiconductor device comprises pillar layers formed on a semiconductor substrate, the pillar layers comprising a first semiconductor pillar layer of a first conductivity type and a second semiconductor pillar layer of a second conductivity type which both have a strip cross section and are alternately formed on the semiconductor surface. A semiconductor base layer of the second conductivity type is selectively formed on one of the first semiconductor pillar layer and second semiconductor pillar layer. The semiconductor base layer has a flat impurity profile.
申请公布号 US2006216896(A1) 申请公布日期 2006.09.28
申请号 US20060363047 申请日期 2006.02.28
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAITO WATARU;OMURA ICHIRO
分类号 H01L21/8242;H01L21/336 主分类号 H01L21/8242
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