| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro lens unit manufacturing method by which a micro lens unit having a good condensing efficiency can be manufactured easily. SOLUTION: The method of manufacturing a micro lens unit which includes a plurality of convex micro lenses 3 and a concave micro lens 4 formed between the adjacent convex micro lenses 3 comprises a convex micro lens formation process wherein the convex micro lenses 3 are formed on a flat transparent layer consisting of a flattened layer 1 formed of an inorganic material and a micro lens material layer 2 stacked thereon (Fig.(b)); and a concave portion formation process wherein, after forming the convex micro lenses 3, a concave portion 4 which will become the concave micro lens is formed in the transparent layer between the convex micro lenses 3 by dry etching (Fig.(c)). COPYRIGHT: (C)2006,JPO&NCIPI
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