| 摘要 |
PROBLEM TO BE SOLVED: To form minute projections of required height at required distribution density universally on a substrate surface. SOLUTION: Thus method comprises: a process in which a thin film coating layer 2 is formed on the base material 1 surface; and a process in which the thin film coating layer is irradiated with a femtosecond or picosecond laser pulse having the prescribed intensity and many minute projections are formed on the thin film coating surface in an irradiation region. Many minute projections are formed on the thin film coating surface based on nonuniformity of the substrate surface or the thin film coating layer in the region making a shot region by one laser beam as an unit by setting the laser intensity near a forming threshold value of the minute projection. COPYRIGHT: (C)2006,JPO&NCIPI
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