| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic microswitch capable of preventing increase in drive voltage and decrease in operation speed, while maintaining high frequency characteristics. SOLUTION: The electrostatic microswitch carries out switching between a signal line 14 provided at a fixed substrate 10 and a movable contact 28 provided at a movable substrate 20 by displacing the movable substrate 20 by an electrostatic attraction force between a fixed electrode 12 provided at the fixed substrate 10 and a movable electrode 23 at the movable substrate 20 which is supported elastically by the fixed substrate 10. The movable substrate 20 is constructed of semiconductors having a plurality of resistivity, and the portion of the movable electrode 23 opposed to the fixed electrode 12 has a low resistivity, and the portion of the movable substrate 20 opposed to the signal line 14 has a high resistivity. COPYRIGHT: (C)2006,JPO&NCIPI
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