| 摘要 |
PROBLEM TO BE SOLVED: To enhance the measuring precision of a measuring target in an elastic wave sensor. SOLUTION: A measuring elastic wave element 12 and a reference elastic wave element 14 are formed on one main surface 10a of a common piezoelectric substrate 10. A measuring responsive film 16 showing adsorbabilities with respect to the measuring target is formed on the measuring elastic wave element 12 so as to be exposed with respect to the measuring target. A reference responsive film 18 similar to the measuring responsive film 16 in kind is formed to the reference elastic wave element 14 and a lid 32 for covering the reference responsive film 18 to hermetically seal the same is joined to one main surface 10a of the piezoelectric substrate 10. Since the reference responsive film 18 is sealed with respect to the measuring target by providing the lid 32, the reference elastic wave element 14 can be formed so as not to show the adsorbabilities with respect to the measuring target. COPYRIGHT: (C)2006,JPO&NCIPI
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