ORIENTED MESOPOROUS THIN FILM AND METHOD FOR PREPARING TEMPLATE AND ORIENTED MESOPOROUS THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide an oriented mesoporous thin film capable of aligning the orientation of pores of a prescribed shape in the concaves formed on a substrate or in the holes passing through the substrate with an arbitrary direction including an approximately perpendicular direction with respect to an in-plane direction of the substrate, and a method for preparing a template and the oriented mesoporous thin film. SOLUTION: The oriented mesoporous thin film comprises a substrate 1 whereon square concaves 2 are formed, and a silica thin film 4 having a plurality of tubular pores 3 formed in the square concaves 2 making use of a macromolecule that can self-duplicate a periodical structure as a template, with the orientation of the tubular pores 3 aligned with an approximately perpendicular direction with respect to an in-plane direction of the substrate 1. COPYRIGHT: (C)2006,JPO&NCIPI