QUADRATURE REDUCTION IN MEMS GYRO DEVICES USING QUAD STEERING VOLTAGES

摘要

Devices and methods for reducing quadrature motion in a MEMS-type gyroscope are disclosed. A MEMS-type gyroscope in accordance with an illustrative embodiment of the present invention can include one or more proof masses configured to oscillate in a drive plane above a sense electrode for measuring Coriolis forces exerted on the one or more proof masses resulting from motion of the gyroscope about an input axis. One or more quad steering voltage members can be positioned adjacent each of the one or more proof masses and activated to electrostatically attract the proof masses toward the sense electrodes to reduce quadrature motion of the proof masses. A levitation force can be induced in certain embodiments to further reduce quadrature motion of the proof masses, if desired.