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经营范围
发明名称
Substrate processing apparatus and substrate cleaning unit
摘要
申请公布号
KR100629767(B1)
申请公布日期
2006.09.28
申请号
KR20030055319
申请日期
2003.08.11
申请人
发明人
分类号
G02F1/13;B08B1/04;B08B3/02;B08B3/10;B08B7/04;G02F1/1333;H01L21/304;H01L21/68
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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