发明名称 METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR
摘要 PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator which reduces manufacturing cost by improving the productivity and yield in manufacturing the piezoelectric vibrator. SOLUTION: The piezoelectric vibrator has been manufactured by a process of cleaning a piezoelectric blank plate; process of vapor-depositing an excitation electrode on the main surface of the blank plate after cleaning; process of adjusting the thickness of the metal electrode provided on the piezoelectric blank plate; process of dividing the piezoelectric blank plate into singular pieces after adjusting the thickness of the metal electrode to form piezoelectric vibration pieces; process of mounting each of the piezoelectric vibration pieces on a package for piezoelectric vibrator via a conductive adhesive; process of drying the conductive adhesive after mounting; and process of minutely adjusting the main vibration frequency of each of the piezoelectric vibrators after drying. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006261746(A) 申请公布日期 2006.09.28
申请号 JP20050072605 申请日期 2005.03.15
申请人 EPSON TOYOCOM CORP 发明人 ISHITA AKINORI
分类号 H03H3/04 主分类号 H03H3/04
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