SOLID STATE IMAGING DEVICE, MANUFACTURING METHOD THEREOF, AND CAMERA

摘要

PROBLEM TO BE SOLVED: To meet the requirement for integration of a device and to widen dynamic range. SOLUTION: A pixel comprises: a photoelectric converter 101 in which electric charges are generated by photoelectric conversion and accumulated; a charge holder 102 which accumulates charges overflowing from the photoelectric converter 101 while the photoelectric converter 101 generates and accumulates electric charges; a source follower amplifier SF-MOS for amplifying electric charges; a transfer MOS transistor Tx-MOS which transfers charges accumulated in the photoelectric converter 101 to the source follower amplifier SF-MOS; and a transfer MOS transistor Ty-MOS which transfers electric charges accumulated in the charge holder 102 to the source follower amplifier SF-MOS, and forms the charge holder 102 of trench structure. COPYRIGHT: (C)2006,JPO&NCIPI