| 摘要 |
PROBLEM TO BE SOLVED: To provide optical equipment in which proper driving control of a driving object member is conducted based on a detection result while high resolution and highly precise position detection of a movable member is conducted even though a reset operation of the movable member is not required. SOLUTION: The optical equipment has a first sensor 8 which outputs a signal that continuously increases or decreases in accordance with the movement of a first movable member 5 along a prescribed direction, a second sensor 9 which outputs a plurality of signals that have mutually different phases and respectively change in a periodical and continuous manner in accordance with the movement of the first movable member along the prescribed direction, a third sensor 10 which detects the fact that the first movable member is located at a prescribed position and a control means 11 which controls the driving of the driving object member between the first and the second movable members. The control means controls the driving of the driving object member based on the output signal from the first sensor until detection is made by the third sensor. After the completion of the detection by the third sensor, the driving of the driving object member is controlled based on the output signal from the second sensor. COPYRIGHT: (C)2006,JPO&NCIPI
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