| 摘要 |
For example, by providing MMF software 10, 11 transferring data using a memory-mapped file respectively in a semiconductor manufacturing apparatus 1 and in an input signal analyzing system 8 , data transfer load placed on control software 4 and analyzing software 9 is reduced. Additionally, in the MMF software 10 , by inserting counter information in the memory-mapped file and by observing the information by the MMF software 11 , communication abnormality is detected.
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