发明名称 PROBE CARD AND METHOD OF MANUFACTURING THE SAME
摘要 A probe card includes a first micro probe head (MPH), a second MPH, and needles. The first MPH includes first conductive traces into which a test signal for testing an object having outer terminals is inputted. The second MPH includes second conductive traces electrically connected to the first conductive traces, respectively, and arranged corresponding to the outer terminals. The second MPH is detachably combined with the first MPH. The needles are electrically connected to the second conductive traces, respectively, to make contact with the outer terminals, respectively. Thus, only the second MPH may be replaced with a new one in accordance with alterations to the object so that time and costs for manufacturing the probe card may be reduced.
申请公布号 WO2006101327(A1) 申请公布日期 2006.09.28
申请号 WO2006KR01008 申请日期 2006.03.20
申请人 PHICOM CORPORATION;LEE, OUG-KI 发明人 LEE, OUG-KI
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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