发明名称 METHODS OF FORMING PLURALITIES OF CAPACITORS
摘要 <p>The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes within a capacitor array area over a substrate. The capacitor electrodes comprise outer lateral sidewalls. The plurality of capacitor electrodes is supported at least in part with a retaining structure (40) which engages the outer lateral sidewalls. The retaining structure (40) is formed at least in part by etching a layer (36) of material which is not masked anywhere within the capacitor array area to form said retaining structure. The plurality of capacitor electrodes is incorporated into a plurality of capacitors .</p>
申请公布号 WO2006101669(A1) 申请公布日期 2006.09.28
申请号 WO2006US06806 申请日期 2006.02.27
申请人 MICRON TECHNOLOGY, INC. 发明人 SANDHU, GURTEJ, S.;DURCAN, MARK, D.
分类号 H01L21/02;H01L27/10;H01L29/92 主分类号 H01L21/02
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