| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology capable of improving the precision of incident position of a laser beam even if the performance of a scanner itself is not improved. <P>SOLUTION: The laser beam radiated from a light source is scanned by the scanner. A first optical system propagates the laser beam scanned by the scanner to almost vertically penetrate a first virtual plane. The first optical system is constituted so that, as the scanner scans the laser beam, a passing position of the laser beam in the first virtual plane moves. A second optical system propagates the laser beam which passes so as to almost vertically penetrate the first virtual plane, to almost vertically penetrate a second virtual plane. The second optical system is constituted so that, when the passing position of the laser beam moves by a distance X in the first virtual plane, the passing position of the laser beam moves by the distance Y being shorter than the distance X in the second virtual plane. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
