| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding structure capable of stabilizing the attitude of a substrate and effective for improving the efficiency of treatment performance without the possibility of the substrate's being damaged and without causing the substrates in a cassette to make contact with each other upon treatment such as the cleaning and drying of the substrates and upon housing and conveying the same, in a manufacturing process of a glass thin plate and a film substrate. SOLUTION: In the substrate holding structure for housing the substrates 20, 21 in the cassette, the substrates are held in the cassette in a state that the substrates 20, 21 are rectangular plate-shaped and the substrates 20, 21 are deflected and curved. Further, in the substrate holding structure, the cassette includes an outer frame structural member and a substantially rectangular parallelepiped housing for housing the substrates 20, 21 therein. The substrates 20, 21 are disposed in a plurality of sheets in parallel with each other at a predetermined interval in the housing. COPYRIGHT: (C)2006,JPO&NCIPI |
