| 摘要 |
PROBLEM TO BE SOLVED: To provide an automated warehouse system capable of constructing a production line not affected by the processing capacity of the automated warehouse system even when a processing device processing a plurality of processes is connected to one automated warehouse system. SOLUTION: This automated warehouse system comprises a plurality of racks 11 storing cassettes 5 storing processed materials (substrates) processed by the processing device, a device port 12 delivering the processed materials when the processed materials are carried to the processing device 2 and the processing materials are collected from the processing device, and a stacker crane 15 carrying the processed materials or the cassettes between the plurality of racks 11 and the device port 12. A movable rack 13 is disposed on the upper part of the device port 12. The automated warehouse system further comprises a plurality of automatic warehouses having lifting devices 17 vertically moving the processed materials or the cassettes stored on the movable racks 13 and movable control parts controlling the operation of the lifting devices 17. COPYRIGHT: (C)2006,JPO&NCIPI
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