| 摘要 |
A method of forming a microlens employing relatively few processing steps and with a controlled microlens radii using a processes including a flowable oxide is disclosed. A lens form having recesses therein is produced and a flowable oxide material is deposited in recesses. Surface tension of the flowable oxide material within the form recesses creates spherical dips within the oxide material. The flowable oxide is then converted into silicon oxide by a heat process. A microlens material is deposited over the silicon oxide having spherical dips, and planarized to form a focus microlens array.
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