| 发明名称 |
PIEZOELECTRIC SENSOR AND ITS MANUFACTURING METHOD |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the measuring precision of a measuring target in a piezoelectric sensor. <P>SOLUTION: The concentration of the measuring target is detected by comparing the oscillation frequency of a measuring elastic wave element 12 with that of a reference elastic wave element 14. A responsive film 16 showing adsorbabilities with respect to the measuring target is formed to the measuring elastic wave element 12 and the oscillation frequency of the measuring elastic wave element 12 is changed by adsorbing the responsive film 16 on the measuring target. A responsive film 18 similar to the responsive film 16 in kind is formed to the reference elastic wave element 14 but the responsive film 18 of the reference elastic wave element 14 is inactivated so as not to show the adsorbabilities with respect to the measuring target adsorbed by the responsive film 16. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2006258767(A) |
申请公布日期 |
2006.09.28 |
| 申请号 |
JP20050080618 |
申请日期 |
2005.03.18 |
| 申请人 |
JAPAN RADIO CO LTD;NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL & TECHNOLOGY |
发明人 |
NARA MAKOTO;YATSUDA HIROMI;TAKAHASHI HIDENORI;MORI TOSHIMASA;KUROSAWA SHIGERU;AIZAWA HIDENOBU |
| 分类号 |
G01N5/02;H01L41/08;H01L41/18;H01L41/22 |
主分类号 |
G01N5/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
