| 摘要 |
The present invention relates to a transporting apparatus and a transporting control method for thin plates, the apparatus for transporting the thin plates such as liquid crystal display panels and glass plates into a processing chamber, comprising a rather large robot ( 14 ) having rotating arms ( 16 ) for transporting large-sized thin plates. The transporting apparatus and a thin plate transporting system can stably raise the plates up to the heights of approximately 2 m and can transporting the plates with the deflected amount of the extended rotating arms ( 16 ) compensated. A horizontal support table ( 13 ) liftably cantilevered on two upright support members ( 12 ) is provided in the apparatus, and the transporting robot ( 14 ) with the rotating arms ( 16 ) is placed on the horizontal support table ( 13 ). Also, the deflected amount of the extended rotating arms is compensated by raising the height of the horizontal support table ( 13 ) based on the deflected amount. The deflected amount can also be compensated by varying the installation angle of the robot ( 14 ) placed on the horizontal support table ( 13 ).
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