发明名称 |
Ferroelectric structures and devices including upper/lower electrodes of different metals and methods of forming the same |
摘要 |
A ferroelectric capacitor structure can include a ferroelectric layer on a lower electrode and an upper electrode on the ferroelectric layer, the upper electrode including a metal oxide and a metal.
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申请公布号 |
US2006214204(A1) |
申请公布日期 |
2006.09.28 |
申请号 |
US20050270730 |
申请日期 |
2005.11.09 |
申请人 |
YOO DONG-CHUL;BAE BYOUNG J;LIM JI-EUN;IM DONG-HYUN;KIM MYUNG-GON |
发明人 |
YOO DONG-CHUL;BAE BYOUNG J.;LIM JI-EUN;IM DONG-HYUN;KIM MYUNG-GON |
分类号 |
H01L29/94;H01L29/76 |
主分类号 |
H01L29/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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