发明名称 LITHOGRAPHY AND ASSOCIATED METHODS, DEVICES, AND SYSTEMS
摘要 An integrated circuit, comprising a plurality of interconnect lines each having a spacing and width, wherein the interconnect lines are formed with a mask (72), at least one of a contact and via connected to at least one of the interconnect lines, wherein the at least one contact and via has the same spacing and width as the interconnect lines, and wherein the contact or via is formed with the mask (72) used to form the interconnect lines. Also disclosed are methods for forming integrated circuits.
申请公布号 WO2006076151(A3) 申请公布日期 2006.09.28
申请号 WO2005US46878 申请日期 2005.12.21
申请人 CARNEGIE MELLON UNIVERSITY;MALY, WOJCIECH P. 发明人 MALY, WOJCIECH P.
分类号 G03F7/20;H01L21/768 主分类号 G03F7/20
代理机构 代理人
主权项
地址