ELECTRODE SUBSTRATE, ELECTROSTATIC ACTUATOR, DROPLET DELIVERY HEAD, DROPLET DELIVERY DEVICE, ELECTROSTATIC DRIVING DEVICE, AND MANUFACTURING METHODS FOR THEM

摘要

PROBLEM TO BE SOLVED: To provide an electrode substrate arranged so as to assure a larger facing area against a driven part and individual electrode, its manufacturing method, an electrostatic actuator using the electrode substrate and a droplet delivery head. SOLUTION: The manufacturing methods at least comprise a process of forming the mask of a chromium film 31 for forming a grooved part 8 on the substrate surface, a process of etching a glass substrate 30 and forming the grooved part 8 aligned with the opening of the mask of the chromium film 31, a process of forming a ITO33 film used as conductive material on the whole surface provided with the grooved part 8, a process of forming a resist 35 in the grooved part 8 and eliminating the ITO film formed on the part other than the grooved part 8, a process of eliminating the mask of the chromium film 31, and a process of eliminating the resist 35. COPYRIGHT: (C)2006,JPO&NCIPI