| 摘要 |
PROBLEM TO BE SOLVED: To provide manufacturing technology of microstructure which can form microstructure having the cycle of 1μm or less, and preferably the cycle of 100 nm or less, control an alignment of the microstructure and improve degree of freedom of an object (substrate or the like) for forming the microstructure. SOLUTION: Polytetrafluoroethylene is rubbed to form (alignment layer forming process) an alignment layer on a flat forming surface of the substrate, for example. Liquid layer of a target material solution where the target material to be the microstructure is dissolved in a solvent is formed (liquid layer forming process) on the alignment layer. Convection is induced (convection inducing process) while evaporating the solvent from the liquid layer. The microstructure having a lattice shape micro pattern can be simply, inexpensively, and alignment-controllably manufactured preferably in the cycle of several tens nm thereby. COPYRIGHT: (C)2006,JPO&NCIPI
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