发明名称 METHOD FOR OPERATING A PULSED ARC SOURCE
摘要 The invention relates to an arc method for depositing insulating layers and to an arc method for low-temperature coating. To this end, an electrical spark discharge, which is ignited or operated on a surface of target of an arc source, is simultaneously supplied with a direct current as well as with pulsed or alternating current. The invention also relates to an arc source in which the target is connected to a power supply unit that is either at least one first pulsed high-current supply (18, 18') and another power supply (13', 18'') or a power supply (21, 21', 22) designed with combinational circuit technology.
申请公布号 WO2006099758(A2) 申请公布日期 2006.09.28
申请号 WO2006CH00123 申请日期 2006.03.01
申请人 UNAXIS BALZERS AG;RAMM, JUERGEN;GSTOEHL, OLIVER;WIDRIG, BENO;LENDI, DANIEL 发明人 RAMM, JUERGEN;GSTOEHL, OLIVER;WIDRIG, BENO;LENDI, DANIEL
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