发明名称 |
METHOD FOR OPERATING A PULSED ARC SOURCE |
摘要 |
The invention relates to an arc method for depositing insulating layers and to an arc method for low-temperature coating. To this end, an electrical spark discharge, which is ignited or operated on a surface of target of an arc source, is simultaneously supplied with a direct current as well as with pulsed or alternating current. The invention also relates to an arc source in which the target is connected to a power supply unit that is either at least one first pulsed high-current supply (18, 18') and another power supply (13', 18'') or a power supply (21, 21', 22) designed with combinational circuit technology. |
申请公布号 |
WO2006099758(A2) |
申请公布日期 |
2006.09.28 |
申请号 |
WO2006CH00123 |
申请日期 |
2006.03.01 |
申请人 |
UNAXIS BALZERS AG;RAMM, JUERGEN;GSTOEHL, OLIVER;WIDRIG, BENO;LENDI, DANIEL |
发明人 |
RAMM, JUERGEN;GSTOEHL, OLIVER;WIDRIG, BENO;LENDI, DANIEL |
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