| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor imaging apparatus supplying output having high sensitivity and low noise. SOLUTION: The semiconductor imaging apparatus comprises: a semiconductor substrate that has a number of pixels aligned in a matrix and comprises a first region including the charge storage region of a photodiode and floating diffusion; and a second region including a transistor having a gate electrode and a source/a drain; a first silicon oxide film that is formed on the semiconductor substrate, covers the surface of the charge storage region in the first region, and is formed as a side wall on a wall at a gate electrode side of at least a partial transistor at the second region; and a silicon nitride film that is formed at the upper portion of the first silicon oxide film, covers the source/drain of at least a partial transistor in the second region, and has an opening at least at one portion of the upper portion of the charge storage region in the first region. COPYRIGHT: (C)2006,JPO&NCIPI |
