| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive high-performance displacement sensor, concerning the displacement sensor for distance measurement for measuring the position to a conductive material such as a metal. SOLUTION: This displacement sensor, which is a displacement sensor capable of measuring rotational speed, is equipped with a sensor substrate which is a flat sensor substrate having a detection surface allocatable so as to be separated from and faced to a conductive material fixed to at least a part of a rotator whose rotational speed is a measuring object, wherein a sensor coil 31 having a prescribed pattern is arranged on the detection surface: and a counter substrate 91 wherein an oscillation circuit is constituted of a distribution capacitance generated by facing the sensor coil 31 to the conductive material and a distribution inductance of the sensor coil 31, capable of converting an oscillation frequency of the oscillation circuit into a count value and outputting it by a digital signal. The displacement sensor is constituted so that the pattern of the sensor coil 31 is arranged so that an electrostatic capacity of the distribution capacitance generated between the sensor coil 31 and the conductive material is changed according to a rotation position of the rotator rotating around a rotary shaft, and that the rotation position is specified by detecting the change of the oscillation frequency of the oscillation circuit by the counter substrate 91. COPYRIGHT: (C)2006,JPO&NCIPI
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